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All Reservations
FNF
chem. hood CR2
chem. hood CR3
chem. hood CR4
CPD
EBL Elphy
EBL Voyager
electrochemical baths
evaporator, e-gun
evaporator, low T
evaporator, thermal
furnace, blue
furnace, grey
ICP-RIE
mask aligner MA5
mask aligner MJB3
NIL press
PDMS vacuum jar
profilometer, Optical
Profilometer, stylus
RIE
Silan. ch.
Silan. ch. CR3
SmartPrint
spinner hood CR2
spinner hood CR4
sputtering
UV-NIL press
Vacuum Oven
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